Browsing by author "Berry, I."
Now showing items 1-3 of 3
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Evaluation of the degree of damage after different conditions of He/H2 dry strip plasma on silica-based porous low-k materials - compatiblity study with chemical solutions
Kesters, Els; Le, Quoc Toan; Boullart, Werner; Han, Q.; Berry, I.; Waldfried, C.; Mertens, Paul; Heyns, Marc (2005) -
Modifications of porous low-k by plasma treatments and wet cleans
Xu, Kaidong; Vereecke, Guy; Kesters, Els; Le, Quoc Toan; Lux, Marcel; Henry, Sally-Ann; Kraus, Harald; Archer, L.; Mertens, Paul; Kovacs, F; Dalmer, M; Gaulhofer, E; Luo, S.J.; Han, Q.Y.; Berry, I. (2007) -
Optimization of resist ash processes on Si045Ge055 substrates for post extension-halo ion implantation
Mannaert, Geert; Vos, Rita; Tsvetanova, Diana; Altamirano Sanchez, Efrain; Witters, Liesbeth; Demand, Marc; Sonnemans, R.; Berry, I. (2011)