Browsing by author "Ruello, Pascal"
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Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin films
Lomonosov, Alexey; Ayouch, Adil; Ruello, Pascal; Vaudel, Gwenaele; Baklanov, Mikhaïl; Verdonck, Patrick; Zhao, Larry; Gusev, Vitalyi (2012)