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Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin films
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1896 since deposited on 2021-10-20
3last month
Acq. date: 2026-08-11
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Views
1896 since deposited on 2021-10-20
3last month
Acq. date: 2026-08-11
Citations