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Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin films
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Authors
Lomonosov, Alexey
;
Ayouch, Adil
;
Ruello, Pascal
;
Vaudel, Gwenaele
;
Baklanov, Mikhaïl
;
Verdonck, Patrick
;
Zhao, Larry
;
Gusev, Vitalyi
ISSN
1936-0851
Issue
2
Journal
ACS Nano
Volume
6
Title
Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin films
Publication type
Journal article
Embargo date
9999-12-31
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