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Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin films

Date

2012
Journal article
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dc.contributor.authorLomonosov, Alexey
dc.contributor.authorAyouch, Adil
dc.contributor.authorRuello, Pascal
dc.contributor.authorVaudel, Gwenaele
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorZhao, Larry
dc.contributor.authorGusev, Vitalyi
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.date.accessioned2021-10-20T12:55:30Z
dc.date.available2021-10-20T12:55:30Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.issn1936-0851
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21052
dc.source.beginpage1410
dc.source.endpage1415
dc.source.issue2
dc.source.journalACS Nano
dc.source.volume6
dc.title

Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin films

dc.typeJournal article
dspace.entity.typePublication
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