Browsing by author "Dalmer, M."

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A study in interactions of plasmas and wet cleans with ULK materials

Xu, Kaidong; Vereecke, Guy; Kesters, Els; Le, Quoc Toan; Lux, Marcel; Kraus, Harald; Henry, Sally - Ann; Archer, L.; Gaulhofer, E.; Kovacs, F.; Dalmer, M.; Mertens, Paul; Luo, S. J; Han, Q. Y (2007)
Post salicidation clean: selective removal of un-reacted NiPt towards NiPtSi(Ge)

Xu, Kaidong; Lauwers, Anne; Vos, Rita; Archer, L.; Kraus, Harald; Demeurisse, Caroline; Mertens, Sofie; Mertens, Paul; Henry, Sally-Ann; Gale, G.; Kovacs, F; Dalmer, M.; Gaulhofer, E (2007)