Browsing by author "Shimizu, Akira"

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Thin film characterization of PEALD Ru layers on an ALD WNC substrate

Volders, Henny; Tokei, Zsolt; Sinapi, Fabrice; Bender, Hugo; Benedetti, Alessandro; Brijs, Bert; Conard, Thierry; Franquet, Alexis; Steenbergen, Johnny; Travaly, Youssef; Sprey, Hessel; Li, Wei-Min; Shimizu, Akira; Park, Hyung Sang (2007)