Thin film characterization of PEALD Ru layers on an ALD WNC substrate

Thumbnail
View/open
Metadata
Show full item record
Authors
Volders, Henny; Tokei, Zsolt; Sinapi, Fabrice; Bender, Hugo; Benedetti, Alessandro; Brijs, Bert; Conard, Thierry; Franquet, Alexis; Steenbergen, Johnny; Travaly, Youssef; Sprey, Hessel; Li, Wei-Min; Shimizu, Akira; Park, Hyung Sang
Conference
Advanced Metallization Conference 2006 - AMC 2006
Title
Thin film characterization of PEALD Ru layers on an ALD WNC substrate
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections