Publication:

Thin film characterization of PEALD Ru layers on an ALD WNC substrate

Date

2007

Proceedings Paper

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Files

15040.pdf 974.39 KB

Author(s)

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Sinapi, Fabrice

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Benedetti, Alessandro

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Conard, Thierry

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Franquet, Alexis

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Steenbergen, Johnny

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Travaly, Youssef

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Park, Hyung Sang

Statistics

1972 since deposited on 2021-10-16

Acq. date: 2026-02-26