Publication:

Thin film characterization of PEALD Ru layers on an ALD WNC substrate

Date

2007
Proceedings Paper
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cris.virtual.orcid0000-0002-7371-8852
cris.virtual.orcid0000-0003-3545-3424
cris.virtual.orcid0000-0002-4298-5851
cris.virtualsource.departmentccd8e202-f81d-4263-8b08-fe90a3417e96
cris.virtualsource.department5345513e-14d5-47e9-a494-1dda4ed18864
cris.virtualsource.department6bca2580-fe8c-4b07-87e1-c34fbfbb75ce
cris.virtualsource.orcidccd8e202-f81d-4263-8b08-fe90a3417e96
cris.virtualsource.orcid5345513e-14d5-47e9-a494-1dda4ed18864
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dc.contributor.authorVolders, Henny
dc.contributor.authorTokei, Zsolt
dc.contributor.authorSinapi, Fabrice
dc.contributor.authorBender, Hugo
dc.contributor.authorBenedetti, Alessandro
dc.contributor.authorBrijs, Bert
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorSteenbergen, Johnny
dc.contributor.authorTravaly, Youssef
dc.contributor.authorSprey, Hessel
dc.contributor.authorLi, Wei-Min
dc.contributor.authorShimizu, Akira
dc.contributor.authorPark, Hyung Sang
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSteenbergen, Johnny
dc.contributor.imecauthorSprey, Hessel
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.date.accessioned2021-10-16T21:32:14Z
dc.date.available2021-10-16T21:32:14Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13196
dc.source.beginpage227
dc.source.conferenceAdvanced Metallization Conference 2006 - AMC 2006
dc.source.conferencedate17/10/2006
dc.source.conferencelocationSan Diego, CA USA
dc.source.endpage232
dc.title

Thin film characterization of PEALD Ru layers on an ALD WNC substrate

dc.typeProceedings paper
dspace.entity.typePublication
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