Browsing by author "Robson, Max"
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Selectivity and Growth Rate Modulations for Ruthenium Area-selective Deposition by Co-Reagent and Nanopattern Design
Mandal, Akhilesh Kumar; van der Veen, Marleen; Rahnemaihaghighi, Negin; Robson, Max; Claessens, Niels; Meersschaut, Johan; Jourdan, Nicolas; Tokei, Zsolt; Delabie, Annelies (2024)