Authors

Mandal, Akhilesh Kumar; van der Veen, Marleen; Rahnemaihaghighi, Negin; Robson, Max; Claessens, Niels; Meersschaut, Johan; Jourdan, Nicolas; Tokei, Zsolt; Delabie, Annelies

DOI

10.1002/admt.202301820

ISSN

2365-709X

Issue

5

Journal

ADVANCED MATERIALS TECHNOLOGIES

Volume

9

Title

Selectivity and Growth Rate Modulations for Ruthenium Area-selective Deposition by Co-Reagent and Nanopattern Design

Publication type

Journal article