Browsing by author "Watanabe, Mitsuhiro"
Now showing items 1-3 of 3
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Paths towards low-damage etching of highly porous organo-silicate low-k dielectrics
de Marneffe, Jean-Francois; Zhang, Liping; Watanabe, Mitsuhiro; yatsuda, koichi; Maekawa, Kaoru; Cooke, Mike; Goodyear, Andy; Leroy, Floriane; Tillocher, Thomas; Lefaucheux, Philippe; Dussart, Remi; Dussarat, Christian; Baklanov, Mikhaïl (2016) -
Pore surface grafting of porous low-k dielectrics by selective polymers
Rezvanov, Askar; Zhang, Liping; Watanabe, Mitsuhiro; Hacker, Nigel; Tokei, Zsolt; Boemmels, Juergen; Armini, Silvia; de Marneffe, Jean-Francois (2016) -
Pore surface grafting of porous low-k dielectrics by selective polymers
Rezvanov, Askar; Zhang, Liping; Watanabe, Mitsuhiro; Hacker, Nigel; Kolomeisky, Anatoly; Armini, Silvia; de Marneffe, Jean-Francois (2017)