Browsing by author "Shen, P."

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Low-k cryo-etching : comparison of four different High Boiling Point Organic (HBPO)

Chanson, Romain; Lefaucheux, P.L.; Dussart, R.; Tillocher, T.; Shen, P.; Urabe, K.; Dussarat, C.; Maekawa, K.; Yatsuda, K.; Tahara, S.; de Marneffe, Jean-Francois (2017)