Low-k cryo-etching : comparison of four different High Boiling Point Organic (HBPO)

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Authors
Chanson, Romain; Lefaucheux, P.L.; Dussart, R.; Tillocher, T.; Shen, P.; Urabe, K.; Dussarat, C.; Maekawa, K.; Yatsuda, K.; Tahara, S.; de Marneffe, Jean-Francois
Conference
AVS 64th International Symposium & Exhibition
Title
Low-k cryo-etching : comparison of four different High Boiling Point Organic (HBPO)
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Meeting abstract
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