Publication:

Low-k cryo-etching : comparison of four different High Boiling Point Organic (HBPO)

Date

2017

Meeting abstract

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Author(s)

Chanson, Romain

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Lefaucheux, P.L.

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de Marneffe, Jean-Francois

Statistics

1947 since deposited on 2021-10-24

Acq. date: 2026-01-25