Publication:

Low-k cryo-etching : comparison of four different High Boiling Point Organic (HBPO)

Date

2017
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorChanson, Romain
dc.contributor.authorLefaucheux, P.L.
dc.contributor.authorDussart, R.
dc.contributor.authorTillocher, T.
dc.contributor.authorShen, P.
dc.contributor.authorUrabe, K.
dc.contributor.authorDussarat, C.
dc.contributor.authorMaekawa, K.
dc.contributor.authorYatsuda, K.
dc.contributor.authorTahara, S.
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.date.accessioned2021-10-24T03:23:12Z
dc.date.available2021-10-24T03:23:12Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28002
dc.identifier.urlhttp://www2.avs.org/symposium2017/Papers/Paper_EM-ThP5.html
dc.source.beginpageEM-ThP5
dc.source.conferenceAVS 64th International Symposium & Exhibition
dc.source.conferencedate28/10/2017
dc.source.conferencelocationTampa, FL USA
dc.title

Low-k cryo-etching : comparison of four different High Boiling Point Organic (HBPO)

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions