Browsing by author "Mankelevich, Yu."

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Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above -50° C

Chanson, Romain; Zhang, Liping; Naumove, Sergei; Mankelevich, Yu.; Tillocher, Thomas; Lefaucheux, Phillipe; Dussart, Remi; De Gendt, Stefan; de Marneffe, Jean-Francois (2018)