Browsing by author "Kanniainen, A."

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Reverse tip sample scanning for precise and high-throughput electrical characterization of advanced nodes

Celano, Umberto; Hantschel, Thomas; Boehme, Thijs; Kanniainen, A.; Wouters, Lennaert; Bender, Hugo; Bosman, Niels; Drijbooms, Chris; Folkersma, Steven; Paredis, Kristof; Vandervorst, Wilfried; van der Heide, Paul (2019)