Authors

Celano, Umberto; Hantschel, Thomas; Boehme, Thijs; Kanniainen, A.; Wouters, Lennaert; Bender, Hugo; Bosman, Niels; Drijbooms, Chris; Folkersma, Steven; Paredis, Kristof; Vandervorst, Wilfried; van der Heide, Paul

Conference

IEEE International Electron Devices Meeting - IEDM 2019

Title

Reverse tip sample scanning for precise and high-throughput electrical characterization of advanced nodes

Publication type

Proceedings paper

Embargo date

9999-12-31