Publication:

Reverse tip sample scanning for precise and high-throughput electrical characterization of advanced nodes

Date

2019
Proceedings Paper
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Author(s)

Celano, Umberto  
;
Hantschel, Thomas  
;
Boehme, Thijs  
;
Kanniainen, A.
;
Wouters, Lennaert  
;
Bender, Hugo  
;
Bosman, Niels
;
Drijbooms, Chris  
;
Folkersma, Steven  
;
Paredis, Kristof  
;
Vandervorst, Wilfried  
;
van der Heide, Paul  

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2042 since deposited on 2021-10-27
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Acq. date: 2026-01-26

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