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Reverse tip sample scanning for precise and high-throughput electrical characterization of advanced nodes
Publication:
Reverse tip sample scanning for precise and high-throughput electrical characterization of advanced nodes
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Date
2019
Proceedings Paper
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44130.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Celano, Umberto
;
Hantschel, Thomas
;
Boehme, Thijs
;
Kanniainen, A.
;
Wouters, Lennaert
;
Bender, Hugo
;
Bosman, Niels
;
Drijbooms, Chris
;
Folkersma, Steven
;
Paredis, Kristof
;
Vandervorst, Wilfried
;
van der Heide, Paul
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Acq. date: 2025-12-12
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Views
2040
since deposited on 2021-10-27
2
last month
Acq. date: 2025-12-12
Citations