Browsing by author "Hwang, Soobin"

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Manufacturing-friendly curvilinear standard cell design

Kim, Ryan Ryoung han; Oak, Apoorva; Sherazi, Yasser; Mirabelli, Gioele; Hwang, Soobin; Yang, Kiho; Chang, Hsinlan (2024)
Source mask optimization ( SMO) study for high-NA EUV lithography to achieve single patterning on random logic metal

Hwang, Soobin; Gillijns, Werner; de Gendt, Stefan; Kim, Ryan Ryoung han (2024)