Browsing by author "Kruemberg, Jens"

Now showing items 1-2 of 2

Optimization of EUV reticle cleaning by evaluation of chemistries on wafer-based mimic test structures.

Pacco, Antoine; Dattilo, Davide; Jonckheere, Rik; Rip, Jens; Dietze, Uwe; Kruemberg, Jens; Holsteyns, Frank (2016)
Single element and metal alloy novel EUV mask absorbers for improved imaging

Philipsen, Vicky; Luong, Vu; Souriau, Laurent; Altamirano Sanchez, Efrain; Adelmann, Christoph; Hendrickx, Eric; Scholze, Frank; Laubis, Christian; Kruemberg, Jens; Reuter, Christian (2017)