Browsing by author "Hooge, Joshua S."

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Extreme-ultraviolet secondary electron blur at the 22-nm half pitch node

Gronheid, Roel; Younkin, Todd; Leeson, Michael J.; Fonseca, Carlos; Hooge, Joshua S.; Nafus, Kathleen; Biafore, John J.; Smith, Mark D. (2011)
Frequency mulitiplication of lamellar phase block copolymers with grapho-epitaxy directed self-assembly sensitivity to prepattern

Gronheid, Roel; Rincon Delgadillo, Paulina; Younkin, Todd; Pollentier, Ivan; Somervell, Mark; Hooge, Joshua S.; Nafus, Kathleen; Nealey, Paul F. (2012)