Extreme-ultraviolet secondary electron blur at the 22-nm half pitch node

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Authors

Gronheid, Roel; Younkin, Todd; Leeson, Michael J.; Fonseca, Carlos; Hooge, Joshua S.; Nafus, Kathleen; Biafore, John J.; Smith, Mark D.

ISSN

1537-1646

Issue

3

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

10

Title

Extreme-ultraviolet secondary electron blur at the 22-nm half pitch node

Publication type

Journal article

Embargo date

9999-12-31

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