Browsing by author "Hall, Lindsey"

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Atomic layer deposition of HfO2 on (100) and (110) oriented silicon surfaces

Nyns, Laura; Ragnarsson, Lars-Ake; Hall, Lindsey; Delabie, Annelies; Heyns, Marc; Van Elshocht, Sven; Vinckier, Chris; Zimmerman, Paul; De Gendt, Stefan (2007)