Atomic layer deposition of HfO2 on (100) and (110) oriented silicon surfaces

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Authors
Nyns, Laura; Ragnarsson, Lars-Ake; Hall, Lindsey; Delabie, Annelies; Heyns, Marc; Van Elshocht, Sven; Vinckier, Chris; Zimmerman, Paul; De Gendt, Stefan
Conference
Physics and Technology of High-K Dielectrics
Title
Atomic layer deposition of HfO2 on (100) and (110) oriented silicon surfaces
Publication type
Proceedings paper
Embargo date
9999-12-31
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