Publication:
Atomic layer deposition of HfO2 on (100) and (110) oriented silicon surfaces
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1 since deposited on 2021-10-16
Acq. date: 2026-02-24
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1952 since deposited on 2021-10-16
Acq. date: 2026-02-24
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Downloads
1 since deposited on 2021-10-16
Acq. date: 2026-02-24
Views
1952 since deposited on 2021-10-16
Acq. date: 2026-02-24
Citations