Publication:
Atomic layer deposition of HfO2 on (100) and (110) oriented silicon surfaces
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Downloads
1 since deposited on 2021-10-16
Acq. date: 2025-10-23
Views
1948 since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Downloads
1 since deposited on 2021-10-16
Acq. date: 2025-10-23
Views
1948 since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations