Browsing by author "Melamed, Yarden"
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Unbiased roughness measurements for 0.55NA EUV material setup
Mathew, Bobin; Arad, Shahar; Brand, Omri; Frank, Tal; Alkoken, Ran; Shilo, Yael; Melamed, Yarden; Yosef, Rotem Mor; Suh, Hyo Seon; Heo, Seonggil; Halder, Sandip (2023)