Authors
Mathew, Bobin;
Arad, Shahar;
Brand, Omri;
Frank, Tal;
Alkoken, Ran;
Shilo, Yael;
Melamed, Yarden;
Yosef, Rotem Mor;
Suh, Hyo Seon;
Heo, Seonggil;
Halder, Sandip
EISBN
978-1-5106-6100-4
ISBN
978-1-5106-6099-1
ISSN
0277-786X
Conference
Conference on Metrology, Inspection, and Process Control XXXVII
Journal
Proceedings of SPIE
Volume
12496
Title
Unbiased roughness measurements for 0.55NA EUV material setup
Publication type
Proceedings paper
Embargo date
2023-03-02