Browsing by author "Meyssen, Veerle"
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Shallow junctions for sub-100 nm CMOS technology
Meyssen, Veerle; Stolk, Peter; van Zijl, Jeroen; van Berkum, Jurgen; van de Wijgert, Willem; Lindsay, Richard; Dachs, Charles; Mannino, Giovanni; Cowern, Nick (2001) -
Ultrashallow junctions for advanced CMOS technology
Stolk, Peter; Meyssen, Veerle; Lindsay, Richard; Dachs, Charles; Mannino, Giovanni; Cowern, Nick (2001)