Shallow junctions for sub-100 nm CMOS technology

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Authors
Meyssen, Veerle; Stolk, Peter; van Zijl, Jeroen; van Berkum, Jurgen; van de Wijgert, Willem; Lindsay, Richard; Dachs, Charles; Mannino, Giovanni; Cowern, Nick
Conference
Si Front-End Processing - Physics and Technology of Dopant-Defect Interactions III
Title
Shallow junctions for sub-100 nm CMOS technology
Publication type
Proceedings paper
Embargo date
9999-12-31
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