Browsing by author "Giannatou, Eva"
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Deep learning nanometrology of line edge roughness
Giannatou, Eva; Constantoudis, Vassilios; Papavieros, George; Papageorgiou, Harris; Rutigliani, Vito; Lorusso, Gian; Van Roey, Frieda; Gogolides, Evangelos (2019)