Publication:

Deep learning nanometrology of line edge roughness

Date

2019

Proceedings Paper

https://doi.org/10.1117/12.2520941

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Files

44029.pdf 839.85 KB

Author(s)

;

Constantoudis, Vassilios

;

Papavieros, George

;

Papageorgiou, Harris

;

Rutigliani, Vito

;

;

Van Roey, Frieda

;

Gogolides, Evangelos

Journal

Proceedings of SPIE

Statistics

2023 since deposited on 2021-10-27

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Acq. date: 2026-08-08