Deep learning nanometrology of line edge roughness

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Authors
Giannatou, Eva; Constantoudis, Vassilios; Papavieros, George; Papageorgiou, Harris; Rutigliani, Vito; Lorusso, Gian; Van Roey, Frieda; Gogolides, Evangelos
Conference
Metrology, Inspection, and Process Control for Microlithography XXXIII
Title
Deep learning nanometrology of line edge roughness
Publication type
Proceedings paper
Embargo date
9999-12-31
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