Publication:

Deep learning nanometrology of line edge roughness

Date

2019
Proceedings Paper
https://doi.org/10.1117/12.2520941
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-3498-5082
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.department0cddeaa4-4a9c-44ee-a5d6-ba4f3945e8a7
cris.virtualsource.departmentafe860fb-17ef-4e14-b8be-130d9091bd88
cris.virtualsource.department5fc73164-72f0-4f1a-a4a8-c759f8c39c67
cris.virtualsource.orcid0cddeaa4-4a9c-44ee-a5d6-ba4f3945e8a7
cris.virtualsource.orcidafe860fb-17ef-4e14-b8be-130d9091bd88
cris.virtualsource.orcid5fc73164-72f0-4f1a-a4a8-c759f8c39c67
dc.contributor.authorGiannatou, Eva
dc.contributor.authorConstantoudis, Vassilios
dc.contributor.authorPapavieros, George
dc.contributor.authorPapageorgiou, Harris
dc.contributor.authorRutigliani, Vito
dc.contributor.authorLorusso, Gian
dc.contributor.authorVan Roey, Frieda
dc.contributor.authorGogolides, Evangelos
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorVan Roey, Frieda
dc.date.accessioned2021-10-27T09:37:07Z
dc.date.available2021-10-27T09:37:07Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.doi10.1117/12.2520941
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33028
dc.identifier.urlhttps://doi.org/10.1117/12.2520941
dc.source.beginpage1095920
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXXIII
dc.source.conferencedate2019-02-24
dc.source.conferencelocationSan Jose, CA California
dc.source.journalProceedings of SPIE
dc.title

Deep learning nanometrology of line edge roughness

dc.typeProceedings paper
dspace.entity.typePublication
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