Browsing by author "Shehzad, Atif"

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Exploring the readiness of EUV photo materials for patterning

De Simone, Danilo; Vesters, Yannick; Shehzad, Atif; Vandenberghe, Geert; Foubert, Philippe; Beral, Christophe; Van Den Heuvel, Dieter; Mao, Ming; Lazzarino, Frederic (2017)
Photoresist absorption measurement at extreme ultraviolet (EUV) wavelength by thin film transmission method

Vesters, Yannick; Shehzad, Atif; De Simone, Danilo; Pollentier, Ivan; Nannarone, Stefano; Vandenberghe, Geert; De Gendt, Stefan (2019)