Publication:

Exploring the readiness of EUV photo materials for patterning

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2258220

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36976.pdf 2.58 MB

Author(s)

De Simone, Danilo

;

Vesters, Yannick

;

;

Vandenberghe, Geert

;

Foubert, Philippe

;

Beral, Christophe

;

Van Den Heuvel, Dieter

;

;

Lazzarino, Frederic

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1998 since deposited on 2021-10-24

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Acq. date: 2026-04-07