Publication:

Exploring the readiness of EUV photo materials for patterning

Date

2017
Proceedings Paper
https://doi.org/10.1117/12.2258220
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

36976.pdf 2.58 MB

Author(s)

De Simone, Danilo  
;
Vesters, Yannick
;
Shehzad, Atif
;
Vandenberghe, Geert  
;
Foubert, Philippe  
;
Beral, Christophe  
;
Van Den Heuvel, Dieter  
;
Mao, Ming  
;
Lazzarino, Frederic  

Journal

Abstract

Description

Metrics

Views

1987 since deposited on 2021-10-24
417item.page.metrics.field.last-week
Acq. date: 2025-10-25

Citations

Metrics

Views

1987 since deposited on 2021-10-24
417item.page.metrics.field.last-week
Acq. date: 2025-10-25

Citations