Authors

Vesters, Yannick; Shehzad, Atif; De Simone, Danilo; Pollentier, Ivan; Nannarone, Stefano; Vandenberghe, Geert; De Gendt, Stefan

ISSN

0914-9244

Issue

1

Journal

Journal of Photopolymer Science and Technology

Volume

32

Title

Photoresist absorption measurement at extreme ultraviolet (EUV) wavelength by thin film transmission method

Publication type

Journal article

Embargo date

9999-12-31