Publication:

Photoresist absorption measurement at extreme ultraviolet (EUV) wavelength by thin film transmission method

Date

2019
Journal article
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Author(s)

Vesters, Yannick
;
Shehzad, Atif
;
De Simone, Danilo  
;
Pollentier, Ivan  
;
Nannarone, Stefano
;
Vandenberghe, Geert  
;
De Gendt, Stefan  

Journal

Journal of Photopolymer Science and Technology

Abstract

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1926 since deposited on 2021-10-27
2last month
Acq. date: 2025-12-11

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