Browsing by imec author "e170285c295157d4f1d7464c42358e6bbc20c849"
Now showing items 1-3 of 3
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Improvement in post-Chemical Mechanical Planarization cleaning process for Ru interconnects
Harada, Ken; Shibata, Toshiaki; Kawase, Yasuhiro; Teugels, Lieve; Heylen, Nancy; Struyf, Herbert (2019) -
Investigation of chemical mechanical planarization (CMP) and post-CMP cleanig for Molybdenum
Harada, Ken; Philipsen, Harold; Teugels, Lieve; Struyf, Herbert (2019) -
Si1-xGex selective etchant for gate-all-around transistors
Harada, Ken; Suzuki, Tatsunobu; Kusano, Tomohiro; Takeshita, Kan; Oniki, Yusuke; Altamirano Sanchez, Efrain; Struyf, Herbert; Holsteyns, Frank (2021)