Browsing by author "Tserepi, A."

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Quantification of line-edge roughness of photoresists. I: A comparison between off-line and on-line analysis of top-down scanning electron microscopy images

Patsis, G.P.; Constantoudis, V.; Tserepi, A.; Gogolides, E.; Grozev, Grozdan (2003)
Roughness analysis of lithographically produced nanostructures: off-line measurement and scaling analysis

Patsis, G.P.; Constantoudis, V.; Tserepi, A.; Gogolides, E.; Grozev, Grozdan; Hoffmann, Thomas (2003)