Browsing by author "Jonas, A.M."
Now showing items 1-4 of 4
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Characterization of the growth of atomic layer deposited WNxCy films on various substrates
Martin Hoyas, Ana; Travaly, Youssef; Schuhmacher, Jorg; Sajavaara, Timo; Whelan, Caroline; Eyckens, Brenda; Richard, Olivier; Giangrandi,; Brijs, Bert; Jonas, A.M.; Vantomme, Andre; Vandervorst, Wilfried; Celis, Jean-Pierre; Maex, Karen (2005) -
Growth and characterization of atomic layer deposited WCxNy
Martin Hoyas, Ana; Travaly, Youssef; Schuhmacher, Jorg; Sajavaara, T.; Whelan, Caroline; Eyckens, Brenda; Richard, Olivier; Giangrandi, Simone; Brijs, Bert; Jonas, A.M.; Vantomme, A.; Vandervorst, Wilfried; Celis, Jean-Pierre; Maex, Karen (2005) -
Interface characterization of nanoscale laminate structures on dense dielectric substrates by x-ray reflectivity
Travaly, Youssef; Schuhmacher, Jorg; Martin Hoyas, Ana; Van Hove, Marleen; Maex, Karen; Abell, Thomas; Sutcliffe, Victor; Jonas, A.M. (2005-04) -
Minimizing plasma damage and in situ sealing of ultra low-k dielectric films by using oxygen-free fluorocarbon plasma
Mannaert, Geert; Baklanov, Mikhaïl; Le, Quoc Toan; Travaly, Youssef; Boullart, Werner; Vanhaelemeersch, Serge; Jonas, A.M. (2005)