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Characterization of the growth of atomic layer deposited WNxCy films on various substrates
Publication:
Characterization of the growth of atomic layer deposited WNxCy films on various substrates
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Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Martin Hoyas, Ana
;
Travaly, Youssef
;
Schuhmacher, Jorg
;
Sajavaara, Timo
;
Whelan, Caroline
;
Eyckens, Brenda
;
Richard, Olivier
;
Giangrandi,
;
Brijs, Bert
;
Jonas, A.M.
;
Vantomme, Andre
;
Vandervorst, Wilfried
;
Celis, Jean-Pierre
;
Maex, Karen
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Views
2000
since deposited on 2021-10-16
1
last month
1
last week
Acq. date: 2026-01-06
Citations