Publication:
Characterization of the growth of atomic layer deposited WNxCy films on various substrates
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2003 since deposited on 2021-10-16
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Acq. date: 2026-08-18
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Statistics
Views
2003 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-08-18
Citations