Browsing by author "Thompson, Heike"

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Etch process development for FLARE(tm) for dual damascene architecture using a N2/O2 plasma

Thompson, Heike; Vanhaelemeersch, Serge; Maex, Karen; Van Ammel, Annemie; Beyer, Gerald; Coenegrachts, Bart; Vervoort, Iwan; Waeterloos, Joost; Struyf, Herbert; Palmans, Roger; Forester, Lynn (1999)