Publication:

Etch process development for FLARE(tm) for dual damascene architecture using a N2/O2 plasma

Date

1999

Proceedings Paper

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Author(s)

Thompson, Heike

;

Vanhaelemeersch, Serge

;

;

Van Ammel, Annemie

;

;

Coenegrachts, Bart

;

;

Waeterloos, Joost

;

Struyf, Herbert

;

;

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1911 since deposited on 2021-10-14

Acq. date: 2026-03-18