Authors

Thompson, Heike; Vanhaelemeersch, Serge; Maex, Karen; Van Ammel, Annemie; Beyer, Gerald; Coenegrachts, Bart; Vervoort, Iwan; Waeterloos, Joost; Struyf, Herbert; Palmans, Roger; Forester, Lynn

Conference

Proceedings of the International Interconnect Technology Conference - IITC; San Francisco, CA, USA.

Title

Etch process development for FLARE(tm) for dual damascene architecture using a N2/O2 plasma

Publication type

Proceedings paper