Publication:
Etch process development for FLARE(tm) for dual damascene architecture using a N2/O2 plasma
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1919 since deposited on 2021-10-14
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Acq. date: 2026-09-11
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Statistics
Views
1919 since deposited on 2021-10-14
6last month
6last week
Acq. date: 2026-09-11
Citations