Browsing by author "Mankelevivh, Yu.A."

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Spatially resolved dynamics of methyl groups removal from SiOCH films by oxygen atoms. Monte-Carlo model of O atoms behavior in nanoporous material

Mankelevivh, Yu.A.; Braginsky, O.V; Kovalev, A.S.; Lopaev, D.V.; Malykhin, E.M.; Rakhimova, T.V.; Rakhimov, A.T.; Vasilieva, A.N.; Zyryanov, S.M; Baklanov, Mikhaïl (2010)