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Spatially resolved dynamics of methyl groups removal from SiOCH films by oxygen atoms. Monte-Carlo model of O atoms behavior in nanoporous material
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1925 since deposited on 2021-10-18
2last month
Acq. date: 2026-04-08
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Views
1925 since deposited on 2021-10-18
2last month
Acq. date: 2026-04-08
Citations