Publication:
Spatially resolved dynamics of methyl groups removal from SiOCH films by oxygen atoms. Monte-Carlo model of O atoms behavior in nanoporous material
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1924 since deposited on 2021-10-18
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Acq. date: 2026-03-17
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Statistics
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1924 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-03-17
Citations