Authors

Mankelevivh, Yu.A.; Braginsky, O.V; Kovalev, A.S.; Lopaev, D.V.; Malykhin, E.M.; Rakhimova, T.V.; Rakhimov, A.T.; Vasilieva, A.N.; Zyryanov, S.M; Baklanov, Mikhaïl

Conference

Materials for Advanced Metallization Conference - MAM

Title

Spatially resolved dynamics of methyl groups removal from SiOCH films by oxygen atoms. Monte-Carlo model of O atoms behavior in nanoporous material

Publication type

Meeting abstract

Embargo date

9999-12-31