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Spatially resolved dynamics of methyl groups removal from SiOCH films by oxygen atoms. Monte-Carlo model of O atoms behavior in nanoporous material
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1921 since deposited on 2021-10-18
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Acq. date: 2026-01-08
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1921 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-01-08
Citations