Browsing by author "Viva, Alessandro"
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Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns
Viva, Alessandro; Pasquali, Mattia; Carolan, Patrick; Sergeant, Stefanie; Meersschaut, Johan; Conard, Thierry; De Gendt, Stefan; Armini, Silvia (2022-03-29)